About the Workshop
Lithography is one of the most critical and complex processes in semiconductor manufacturing. It transfers circuit patterns from photomask designs onto silicon wafers, directly setting the limits for critical dimension (CD), overlay accuracy, and chip performance.
As India establishes its commercial semiconductor manufacturing ecosystem, there is an urgent need for a unified national platform where experts across fabs, equipment OEMs, materials suppliers, EDA vendors, and academic labs can share research, align technical roadmaps, and cultivate specialized workforce talent.
InLitho 2027, organized by SAMARTH at IIT Gandhinagar, is established to serve as that premier forum: a recurring national conference for technical exchange, workforce development, and collaborative research in semiconductor lithography.
Imaging optics, advanced photoresists, overlay metrology, defectivity, and process-window optimization.
193nm immersion, self-aligned multiple patterning (SADP/SAQP), EUV, High-NA EUV, and advanced metrology.
Optical Proximity Correction (OPC), SMO, Inverse Lithography Technology (ILT), GPU acceleration, and digital twins.
Inspection metrology, Advanced Process Control (APC), defect-yield modeling, and Design-Technology Co-Optimization.
Value Proposition
Gain insights into scalable lithography roadmaps—from DUV immersion and High-NA EUV to computational lithography and AI-driven process control.
Engage directly with leaders from semiconductor fabs, equipment and materials suppliers, EDA companies, research labs, and government policymaking bodies in one venue.
Advance your research or career through interactive student poster sessions, tours of state-of-the-art nanofabrication cleanrooms, and direct discussions with industry practitioners.
Host City & Institution
Founded in 2008, IIT Gandhinagar’s permanent campus sits gracefully on the scenic banks of the Sabarmati river in Palaj. Recognized as one of India's first GRIHA 5-Star rated green campuses, it provides an inspiring academic and research environment with world-class auditorium facilities, nanofabrication cleanrooms, and lush riverside surroundings.
As Gujarat anchors monumental semiconductor initiatives including commercial fabs, ATMP/OSAT packaging facilities, and supply-chain partners, IIT Gandhinagar serves as the premier academic anchor driving semiconductor workforce development and collaborative lithography R&D.
